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Features
1) Media resistive pressure sensor die
2) 0 to 1200 kPa range (12 bar or 174 PSI)
3) Output span 150 mV @ 5 V
4) Temperature Range -40°…+150°C
5) Linearity 0.05%
6) Pads on one side
7) Die size 1.73×1.18 mm2
8) Absolute pressure sensor
9) High Reliability
10) Low Cost

Applications
1) Braking systems
2) Tire pressure
3) Engine control
4) Oil pressure

Description
The MS7212-A2 is an absolute silicon micro-machined pressure sensor for harsh environment, with the pads on one side. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a glass cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled glass is bonded on the backside. As the pressure port consists of glass and silicon, both stable in most of the chemicals, the MS7212-A2 is suitable for media-resistive applications.